DESCRIPTION OF CURRENT SPONSORED PROJECTS                       

An exciting new area of research involves the development of new sensors using microfabrication techniques. In some cases these sensors are analogs of natural senses; for instance, we are working on an "electronic tongue" for use in new chemical and biological agent sensors. Another new area of research is the study of how biological entities detect infrared radiation, and the application of this knowledge to engineered IR detectors (such as microbolometers). This work is all generally related to the fabrication and design of new micro-sensors and actuators using IC processing and silicon micromachining (micro-electro-mechanical systems, or mems). These sensors include optically interrogated pressure sensors using micromachined Fabry-Perot cavities, and micro-miniature inductive proximity sensors. We have also investigated the application of MEMS technology in such novel environments as mechanical bearings and fluid seals. 

Another major emphasis of our group has been the development of models of lossy transmission lines and interconnects. We are particularly interested in the impact of finite metal conductivity on interconnect characteristics, as well as the effect of substrate conductivity (e.g., semiconductor substrates) on signal propagation. Our models focus on the prediction of inductive and resistive effects, from dc resistance and internal inductance to skin-depth and proximity effect-dominated behavior, in both the frequency and time domains. 

PROJECTS FUNDED—JOINT

Texas Consortium for the Development of Biological Sensors, DAAD19-99-1-0207

Principal Investigator: A. Ellington (ten research groups), Army Research Office, MURI , 5/1/1999 -4/30/2002 

Center for the Design and Fabrication of Sensor Arrays, J. Shear; total of 8 research groups

Beckman Foundation Technologies Initiative,  7/1/1999-6/30/2004.

CONTINUING PROJECTS—INDIVIDUAL

Modeling and High Frequency Characterization of Low K Dielectrics, D. P. Neikirk

SEMATECH, , March 1996-March 2000 

Modeling (Electromagnetic) of Multilevel Interconnects for Capacitance, Conductance, Delay, and Crosstalk for Various Al and Cu Based System, D. P. Neikirk, SEMATECH, 

March 1996-March 2000

CONTINUING PROJECTS—JOINT

The Development of an Electronic Tongue, 1R01GM57306-01, Eric Anslyn (four research groups), National Institute of Health,  4/1/1998-3/31/2001 

Biological Detection Systems for Electromagnetic Spectral Signatures, F49620-98-1-0480

A. J. Welch (five research groups), AFOSR, MURI, 6/1/1998-5/31/2000

Modeling and Design for Reduced Cross Talk in Mixed Signal Analog / Digital IC Packages for Wireless Applications (with Guanghan Xu),  DoD Advanced Research Projects Agency, Fall, 1995-Summer,  1999