• AET - Rapid Thermal Process
• CMP

MRL Industries 6" atmostpheric furnaces

• Anneal (Doped) - MRL C41
• Field Oxide - MRL C42
• Gate Oxide - MRL C43
• Anneal (Undoped) - MRL C44
• POCl - MRL C51

MRL Industries LPCVD 6" furnaces

• LPCVD Nitride - MRL
• LPCVD Polysilicon - MRL
• LPCVD Low Temp Oxide - MRL

PTL LPCVD 4" Thermtec furnace

• LPCVD Nitride - PTL
• LPCVD Polysilicon - PTL
• LPCVD Low Temp Oxide - PTL

Brute American XL Thermco 4" Atmospheric furnaces

• 4" Oxide (Undoped) - Brute
• 4" Field Oxide (Undoped) - Brute
• 4" Gate Oxide - Brute
• 4" Sinter - Brute

Dryer and Spray Acid Tool

• SRD #1 Spin Rinser Drier - Verteq
• SRD #2 Spin Rinser Drier - Verteq
• SAT #1 Spray Acid Tool - Semitool
• SAT #2 Spray Acid Tool - Semitool

Diffusion Wet Bench

• Diffusion Preclean Acid Hood(Undoped) -
  WPS - C16
• Diffusion Preclean Acid Hood(Doped) -
  WPS - C14
• Diffusion Preclean Acid Hood(Gate) -
  WPS - C11

• Atomic Force Microscope
• Rudalph Elipsometer
• NANO SPEC Microscope
• NANO SPEC AFT Microscope
• Laser Microscope
• VEECO AP-150
• JEOL 6400 Scanning Electron Microscope
• Alphastep-Tencor
• Woollam Ellipsometer
• Hummer, Gold sputtering system

• Asher - March
• HMDS Oven - Yes
• Mask Aligner - K.Suss
• Solvent Hood w/ Spinner L10 - WPS
• Jeol 6000 - E-Beam Lithography
• Brewer Science Spinner

• Mask Aligner - EVG
• Mask Aligner - HTG
• Mask Aligner - K.Suss #579
• Wafer Press
  
• Acid Hood - WPS - J19
• Solvent Hood - WPS - J21
• Solvent Hood - WPS - J23
• Solvent Hood - WPS - J24

• Table Top Furnace - Brute
• Sputter - Varian
• Evaporator (Metal Deposition) - Veeco
• Sputter - KJL(NEW)
• ETCH SRD
• Acid Hood - WPS - G14
• Acid Hood - WPS - G12
• Solvent Hood - WPS - G11
• Solvent Hood - WPS - G08

• Tabletop Furnace - RTA
• Tabletop Furnace - Blue M
• Rapid Thermal Anneal - A G Associates
• Evaporator (Metal Deposition) - CHA
• Acid Hood - WPS - E02
• Solvent Hood - WPS - E05

• RIE Etcher- Orange
• RIE Etcher (Batchtop) - Plasma Therm
• RIE Etcher (790 Plasma Therm #2) - Plasma Therm
  
  
• Clean - SRD
• Solvent Hood - WPS - H03
• Solvent Hood - WPS - H06
• Acid Hood - WPS - H14
• Acid Hood - WPS - H15
• Acid Hood - WPS - H16
• Acid Hood - WPS - H18

• RIE Etcher and PECVD Chamber
  (790 Plasma Therm #1) - Plasma Therm
• Trion Oracle: Plasma Etch
  
  
• Solvent Hood - WPS - F03
• Acid Hood - WPS - F06
• Acid Hood - WPS - F07
  
  
• Oxford Etcher