Silicon Etch Bay

H03 - Hood - WPS
Location: 1.738
*****
*****Description: Solvent Hood - Do NOT remove Labware from this tool!

*****Compatible Materials: Si / SiGe

*****Incompatible Materials: III-V
1. Log on to the tool using the LabAccess terminal.
12. Log off of the tool using the LabAccess terminal.