*****Compatible Materials: Si compatible tool like Si / SiGe / Hi K / Metal (except Au)

*****Incompatible Materials: III-V / Polymers / Indium

*****Features: 2 chambers
*****gases: Cl2, O2, CHF3, CF4, He or Ar (depending on the cylinder)

*****Recipe:
*****Quartz/SiO2: CHF3 (67%) 02 (33%)
*****RF=150W
*****32nm/min