Diffusion BayAET - Rapid Thermal Process
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| ***** *****Description: Rapid Thermal Process *****Compatible Materials: Si / SiGe / Hi-K (As per label) *****Incompatible Materials: Metals (Except Hafnium for Hi-K) |
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| 1.) Log on the Tool Using the LabAccess Terminal 2.) move the mouse to the left of the screen a menu will appear 3.) Select "LOGIN/LOGOUT" user: guest pass: guest 4.) Depress the Green "START" button found on the front of the tool. 5.) Double Click "Open Door" from left menu 6.) Unlatch & Open the door after recipe completes 7.) Inspect the TC to make sure it is in the proper position and not broken. NOTE: TC should be slightly elevated above the wafer holder to insure positive pressure is applied against the back side of your sample/wafer. 8.) Close & Latch Door 9.) Double Click "Close Door" from left menu To Edit/Create a New Recipe: Select "Recipe Editor" Select the Current/Default Profile: "utexas.edu_aet" Log In - Use Above Login Information 10.) Select one of the fallowing: Create New Recipe: Open Existing Recipe: Select Recently Opened Recipes: 11.) Create/Adjust Required Steps and all applicable settings for each step: Logger_Sample_Period msec Vent Temp_Cal_Function UHP_N2_Flow_SP_slm TEMP_SP Deg C Each setting can be adjusted by double clicking any of each steps variables, or by double clicking the step heading field and adjusting the settings under either the "Control Info" or the "Step Detail" headings. 12.) Select "Check Recipe Syntax" button from menu to check for syntax errors with the current recipe. 13.) After making the required adjustments or creating a new recipe "Save" the recipe using the menu at the top of the screen and then select "Exit" Note: Be Sure when editing existing recipes to save your modified recipe with a new name. Otherwise you will overwrite the existing recipe with your new one. 14.) Select "Open Door" from the Left Menu 15.) Place Wafer/Sample inside, close and latch door. 16.) Select "Close Door" from the Left Menu 17.) Select "Start Recipe" from the Left Menu 18.) Select from the appropriate tab/menu To find a recipe you have created/edited select the "Advanced" tab. Then press the "Browse" button Navigate to find where you saved your recipe. After selecting your recipe push the "Open" Button 19.) Select the "Execute" Button 20.) Select "Yes" if you are ready for the recipe to be loaded and executed. During your recipe run you can select the Home Panel, the Recipe Monitor and Trends to see different information regarding your current recipe run. 21.) When completed, Select "Return to Idle" & Press the Red "STOP" button on the front of the tool. 22.) Log out of the tool using the LabAccess Terminal |
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