Diffusion Bay4" Gate Oxide - Brute
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| ***** *****Description: Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube) *****Compatible Materials: Si/SiGe, Undoped wafers - Gate oxidation (wet or dry) *****Incompatible Materials: III-V / Hi K |
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| 1. Log on to the tool using the LabAccess terminal. 12. Log off of the tool using the LabAccess terminal. |
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