Diffusion Bay

4" Sinter - Brute
Location: 1.756
*****
*****Description: Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube)

*****Compatible Materials: Si Metalized wafers

*****Incompatible Materials: III-V / Hi K / SiGe / Photoresist
*****
1. Log on to the tool using the LabAccess terminal.
12. Log off of the tool using the LabAccess terminal.