III-V Metals BayAG Associates
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| ***** *****Description: Heatpulse 610 RTA (Rapid Thermal Anneal) *****Compatible Materials: III-V Only *****Incompatible Materials: |
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| 1. Log on to the tool using the LabAccess terminal. 2. Go to RTA look for any maintenance notices. Check logbook for any notes about the operating performance. 3.Go to service aisle behind RTA. Turn on the “clean dry air” valve, (the green valve). Turn on the N2. DO NOT touch the pressure regulator for the N2. Doing so could break the quartz tube, which is very expensive. 4.Turn on N2 valve, beside the RTA, until the pressure gauge on the front of the RTA reads 5 or 6 psi." 5.Turn on the RTA. 6. Turn on the computer monitor, select your professor’s group. Load the recipe that you wish to run. Position the TC/Pyro switch to the appropriate setting. 7. Do a dummy run to make sure the program is running correctly. Skipping this step could produce a process error and ruin your sample. Wait until the chamber has cooled, ~5 minutes, before opening the chamber and loading your sample. 8. Run program. When program is finished wait at least 5 minutes before opening the chamber to unload your sample. Skipping this step could cause bowing in your sample and/or the Si wafer. Close the RTA chamber. 9. Sign the Log Book and record any problems that you encountered while running your program. 10. Close the N2 valve completely shut. Turn off the RTA. Turn off the computer monitor. 11.Go to the service aisle behind RTA. Turn the N2 valve to the off position. Turn the “clean dry air” valve off. 12. Log off of the tool using the LabAccess terminal. |
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