Diffusion Bay

SAT #2 Spray Acid Tool - Semitool
Location: 1.756
*****
*****Description: Semitool Spray Acid Tool, Piranha Clean Required

*****Compatible Materials: Si / SiGe

*****Incompatible Materials: Metals / Photoresist
*****
1. Log on to the tool using the LabAccess terminal.

12. Log off of the tool using the LabAccess terminal.