*****Compatible Materials: Si / SiGe

*****Incompatible Materials: Photoresist / III-V

1. Log on to the tool using the LabAccess terminal.
2. Venting System

• a) If system is in standby – Pump light is blinking
  
• b) Turn on Liquid Nitrogen
  (flip switch up on the back of electronics cabinet)
• c) Pull down standby lock in panel
  
• d) Rotate knob to vent
  
• e) Wait until system is vented"
  

3. Loading (Please make sure fill out the logbook)

• a) Wear clean gloves
  
• b) Make sure wafers have undergone a cleaning
  process prior to load in to sputter system
  
• c) Unload planet and close door to
  maintain system integrity
  
• d) Slip wafers in well
  
• e) Replace planet and spin to ensure wafers
  remain in place
  
• f) Rotate knob to pump and push in and up on the
  door until system begins pumping down
  
• g) Wait several hours until system is at < 5x10-7 Torr"
  

• a) Turn valves on in access corridor (3 black valves and Ar valve)
• b) Turn fixture drive to manual
• c) Slowly increase drive knob to 90%
• d) Turn on Micro-Controller (Pressure Gauge)
• e) Orifice – Turn from max to control
• f) Backfill 2 Turn on
• g) Micro-controller should read 3E-3 Torr (3 mTorr), adjust knob on system slightly if pressure needs to be adjusted
• h) Turn on 3 power supplies (voltage and current) in utility corridor
• i) Make sure all 3 lights for electron guns are on
• j) Turn all 3 guns on
• k) Increase Control of 3 guns to 48%
• l) Make sure targets are on A-1, B-2, C-3
• m) Wait several minutes to start sputter
• n) Open shutters A-1, B-2, C-3

5. After Deposition (Turn off)

• a) Close shutters
• b) Turn gun currents down
• c) Switch guns off
• d) Turn Backfill 2 off
• e) Turn Orifice to Maximum
• f) Reduce Fixture Drive
• g) Switch Fixture Drive to Auto
• h) Turn off Power Supplies and 3 black valves before venting system
• I) Vent

6. Standby

• a) After pumping chamber down, wait _ hour to switch system to standby
• b) Turn off liquid nitrogen (switch back of electronics cabinet to middle position)

7. Log off of the tool using the LabAccess terminal.