Diffusion Bay

SRD #2 Spin Rinser Drier - Verteq
Location: 1.756
*****
*****Description: Verteq Spin Rinser Drier, Piranha Clean Required

*****Compatible Materials: Si / SiGe

*****Incompatible Materials: Metals / Photoresist
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1. Log on to the tool using the LabAccess terminal.

12. Log off of the tool using the LabAccess terminal.