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Process Equipment

Name Area Locationsort descending Type
Vacuum Oven (Blue vacuum Oven) South Cleanroom Diffusion
sputtering KJL south cleanroom South Cleanroom III-V Metals
Sputter Coater Emitech K575X -SEM sample preparation North Cleanroom Metrology
Step and Flash Imprint Lithography IMPRIO 100 South Cleanroom Silicon Lithography
Diffusion Field Oxide - BRUTE- Undoped Tube #4 North Cleanroom Diffusion
Ion miller Oxford ionfab 300 South Cleanroom III-V Etch
Optical Microscopes Olympus BX51 North Cleanroom Metrology
Optical Microscope Olympus BH-2 North Cleanroom Metrology
TriboIndenter TI 950 : Nanomechanical characterization South Cleanroom 1.205 Metrology
Nanospec Reflectometer AFT North Cleanroom 1.7 Metrology
Optical Confocal Microscope LEXT Olympus North Cleanroom 1.7 Metrology
Four-point probe Veeco FPP5000 North Cleanroom 1.7 Metrology
Nanospec Reflectometer North Cleanroom 1.7 Metrology
ALD Cambridge NanoTech SavannahTM 200 North Cleanroom 1.704 Silicon Metals
Asher Nordson March PX-250 North Cleanroom 1.720 Silicon Lithography
HMDS - YES Oven North Cleanroom 1.720 Silicon Lithography
Photolithography i-g line mask aligner SussMicrotec -MA6/BA6 North Cleanroom 1.720 Silicon Lithography
Photoresist Spin Coater - L10 (no Au) North Cleanroom 1.720 Silicon Lithography
Photoresist Spin coater- Brewer Science North Cleanroom 1.720 Silicon Lithography
Asher (Microwave) 300 PVA Tepla North Cleanroom 1.720 Silicon Lithography
Photolithography E-beam writer Jeol 6000 FSE North Cleanroom 1.720A Silicon Lithography
Photolithography i-g line mask aligner - EVG North Cleanroom 1.728 III-V Lithography
Wafer Bonder AML North Cleanroom 1.728 Diffusion
Photolithography i-g line mask aligner - MJB4 Suss Microtec North Cleanroom 1.728 III-V Lithography
Wafer Press North Cleanroom 1.728 III-V Lithography
Acid Hood - WPS - J19 North Cleanroom 1.728 III-V Lithography
Photoresist Spin coater J21 - J23 North Cleanroom 1.728 III-V Lithography
Solvent Hood - WPS - J24 North Cleanroom 1.728 III-V Lithography
Atomic Force Microscope - DI3000 North Cleanroom 1.728 Metrology
Atomic Force Microscope Nanoscope V Veeco North Cleanroom 1.728 Metrology
Ellipsometer J.A. Woollam M-2000 DI North Cleanroom 1.730 Metrology
SEM ZEISS Neon 40 w/ EDAX & Raith pattern generator North Cleanroom 1.730A Metrology
Etcher ICP STS North Cleanroom 1.736 Silicon Etch
Sputter DC Aluminum/ Ti - UNIVEX450 North Cleanroom 1.736 Silicon Metals
Thermal Evaporator (Metal Deposition) - Veeco North Cleanroom 1.736 Silicon Metals
Sputter DC/RF- KJL(NEW) North Cleanroom 1.736 Silicon Metals
Acid Hood - G12 & G14- Metal etch (no Au) North Cleanroom 1.736 Silicon Metals
Solvent Hood - G8 & G11 - Cr/Al etch North Cleanroom 1.736 Silicon Metals
Etcher RIE Batchtop PlasmaTherm North Cleanroom 1.738 Silicon Etch
Etcher RIE 790 Plasma Therm #2 North Cleanroom 1.738 Silicon Etch
Solvent Hood - H03 (No Au) North Cleanroom 1.738 Silicon Etch
Acid Hood - H14 & H15- Resist removal (no Au) North Cleanroom 1.738 Silicon Etch
Acid Hood - H16 & H18- KoH Etch North Cleanroom 1.738 Silicon Etch
Etcher ICP Deep Silicon PlasmaTherm Versaline North Cleanroom 1.738 Silicon Etch
Rapid Thermal Anneal - AG Associates-Allwin610 III-V North Cleanroom 1.748 III-V Metals
E-beam evaporator CHA#1 North Cleanroom 1.748 III-V Metals
E-beam Evaporator & Ion Assisted - CHA#2 North Cleanroom 1.748 III-V Metals
Acid Hood - WPS - E02 North Cleanroom 1.748 III-V Metals
Optical Profilometer -Dektak 150 North Cleanroom 1.748 Metrology
Solvent Hood - E05 Lift off applications North Cleanroom 1.748 III-V Metals
E-beam evaporator CHA#3 North Cleanroom 1.748 III-V Metals
PECVD (790 Plasma Therm #1) North Cleanroom 1.750 Diffusion
Etcher RIE 790 Plasma Therm #1 North Cleanroom 1.750 III-V Etch
Etcher Trion Oracle North Cleanroom 1.750 Silicon Etch
Solvent Hood - WPS - F03 North Cleanroom 1.750 III-V Etch
Acid Hood - WPS - F06 North Cleanroom 1.750 III-V Etch
Etcher RIE Oxford 80 North Cleanroom 1.750 Silicon Etch
Etcher ICP Oxford 100 North Cleanroom 1.750 III-V Etch
Etcher ICP 2300 Exelan Flex LAM North Cleanroom 1.750 Silicon Etch
Spin Rinse Dryer Verteq 1 & 2 (No Photoresist, no Metal) North Cleanroom 1.756 Diffusion
Anneal (Doped) - MRL North Cleanroom 1.756 Diffusion
Anneal (Field Oxide) - MRL North Cleanroom 1.756 Diffusion
Anneal (Gate Oxide) - MRL North Cleanroom 1.756 Diffusion
Anneal (Undoped) - MRL North Cleanroom 1.756 Diffusion
Diffusion Doping POCl3 - MRL North Cleanroom 1.756 Diffusion
LPCVD Nitride - MRL North Cleanroom 1.756 Diffusion
LPCVD Amorphous silicon - MRL North Cleanroom 1.756 Diffusion
LPCVD Low Temp Oxide - MRL North Cleanroom 1.756 Diffusion
Diffusion Oxide - BRUTE - Undoped - 4" North Cleanroom 1.756 Diffusion
Diffusion Gate Oxide - BRUTE - 4" Tube #5 North Cleanroom 1.756 Diffusion
Diffusion Sintering -BRUTE- 4" Tube #6 North Cleanroom 1.756 Diffusion
Spin Rinse Dryer SAT (no PR. no Metal) North Cleanroom 1.756 Diffusion
Diffusion Pre-clean Acid Hood C-16 North Cleanroom 1.756 Diffusion
LPCVD Nitride PTL North Cleanroom 1.756 Diffusion
Diffusion Pre-clean Acid Hood C-14 North Cleanroom 1.756 Diffusion
LPCVD PolySilicon PTL North Cleanroom 1.756 Diffusion
Diffusion Pre-clean Acid Hood (Gate) C-11 North Cleanroom 1.756 Diffusion
LPCVD LTO PTL North Cleanroom 1.756 Diffusion
ALD Fiji w/ remote plasma & ozone generator North Cleanroom 1.756 Silicon Metals
Rapid Thermal Process -AET- North Cleanroom 1.756A Diffusion
Rapid Thermal Anneal Silicon -Allwin 610 - North Cleanroom 1.756A Diffusion
UV Ozone cleaner North Cleanroom 1.756A Diffusion
XRD Rigaku SmartLab North Cleanroom 1.802 Metrology
TEM TECNAI G2 F30 X-TWIN North Cleanroom 1.824 Metrology
Furnace (Sintering ) - MiniBrute North Cleanroom 1.824 Silicon Metals
Wire Bounder West-bond 7400A South Cleanroom 2.406 Packaging
Dicing Saw ACT South Cleanroom 2.406 Packaging
Wire bonder (Au ball ) Kulicke & Soffa South Cleanroom 2.406 Packaging
Chemical-mechanical planarization (CMP) North Cleanroom Diffusion Back Aisle Silicon Etch
Plasma Cleaner _TEM holder North Cleanroom TEM TECNAI Room Metrology