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NNIN/MRC WorkshopFabrication of sub-100nm features with imprint lithography covering a full waferMarch 4th-5th, 2008 Microelectronics Research Center at JJ Pickle Campus
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Tuesday March 4th, 2008 |
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8:00-8:05 |
Welcome by the MRC Director |
Sanjay K Banerjee MRC Director |
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8:05-8:10 |
Review of the day schedule and presentation of the workshop staff members |
Marylene Palard
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8:10-9:10 |
First part lecture on nano-IC Fabrication |
Dean P Neikirk, Professor at UT |
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9:10-9:20 |
Coffee Break (assign group n° and bunny suit size) |
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9:20-10:20 |
Second part lecture on nano-IC Fabrication |
Dean P Neikirk, Professor at UT |
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10:20-10:30 |
Coffee Break |
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10:30-11:30 |
Overview of the Step and Flash Imprint Lithography techniques and applications |
Molecular Imprints Engineer |
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11:30-12:30 |
Lunch Break. Fill in the NNIN profile data base |
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12:30-13:00 |
Hands-on session description |
Marylene Palard |
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13:00-14:30 15:00-16:30 |
Imprinting with SFIL, IMPRIO100 Template 10mmx10mm Mesa with 100nm features Si-Monomat for etch barrier |
Marylene Palard |
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14:30-15:00 |
Break |
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13:00-14:30 15:00-16:30 |
Etching Etch barrier thickness measurement onto Mesa, with Nanospec AFT, recipe 331 Etch barrier + transfer layer + Si etch on RIE Plasma Therm n°2, SEM analysis |
Johnny Jonhson, Gabriel Glenn |
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16:30-17:00 |
Questions Fill in the NNIN profile data base (end) |
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Wednesday March 5th, 2007 |
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8:30-10:00 10:30-12:00 |
Imprinting with SFIL-R, IMPRIO100 Template 10mmx10mm Mesa with 100nm features Si-Non Monomat for etch barrier |
Marylene Palard |
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10:00-10:30 |
Break |
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8:30-10:00 10:30-12:00 |
Etching Silspin coating Silspin coating + Etch barrier + transfer layer + Si etch on RIE Plasma Therm n°2, SEM analysis on Zeiss SUPRA40 |
Johnny Jonhson, Gabriel Glenn |
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12:00-12:30 |
Conclusion of the workshop and Survey |
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According to the number of attendees to the workshop we will have maximum 2 groups of maximum 5 persons each.
Each group will go trough all the process steps, by rotation, during the afternoon hands-on session in the cleanroom.
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Imprinting, South Cleanroom |
Group 1 |
Group 2 |
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Etching, North Cleanroom |
Group 2 |
Group 1 |
Last modified: May 25, 2007.
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Department of Electrical & Computer Engineering College of Engineering
The University of Texas at Austin
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