The following list of chemicals are supplied by the MRC for local use:
- Acetone, CMOS
- Aluminum Etch, 16:1:1:2
- BOE CMOS (Buffered Oxide Etch) 6:1
- Developer, MF-26A Microposit
- Hydrochloric Acid, 37% CMOS
- Hydrofluoric Acid, 49%, CMOS
- Hydrogen Peroxide, 30% CMOS
- Isopropyl Alcohol, CMOS
- Methanol, CMOS
- Nano-Strip solution
- Nitric Acid, 70%, CMOS
- PhotoResist, AZ-5209-E
- Sulfuric Acid, 96%, CMOS
- Transetch N (Nitride etch)
Solvents, Acids, Photolithograhy, Oxidizers
ZEP is available in MER stock, Please let know Ricardo or Bill to buy it from MER.
The cost of the ZEP per 100cc is $1000.