| New KJL scheduling procedure:
1. Each user will be allowed to have a maximum of two (2) reservations at any time.
2. Reservations may not be made beyond two weeks in advance.
3. Maximum reservation duration for Chamber B shall be three (3) hours. The target in chamber B is a 6-inch Ta target
4. Maximum reservation for Chamber A shall be twelve (12) hours.
5. In Chamber A, right target location, 4-inch Hf target shall not be removed, except in cases of co-sputtering requirements.
6. Target changing shall only be done late in the evening, after reserved slots are over, or after 7:00PM, which ever is later, and before 03:00 AM or at completion of reserved use, which ever is earlier. This will afford pump-down time for morning use of the machine.
7. Users shall wear appropriate air purifying respirator when opening the chamber for target changing. Users shall consult with the MER Facilities Office, Safety Coordinator for specifications on which respirator and cartridges to obtain.
8. Target shields shall not be cleaned in the cleanroom. They shall be removed from the cleanroom for cleaning when required.
9. Users who initiate a target change shall reserve and use the machine the next day, not starting later than 09:00AM. Users who plan a target change may check with the last reserved user and request they change target for them. Users shall be willing to change targets for others in this scenario.
10. With the Hf target typically always installed, users who only need to sputter Hf may use the machine when available without reservation, and that usage shall not count against their reservation slots.
11. Users may use Chamber B without reservation in the event the tool is not in use or within one hour of a reserved slot, and shall not count that usage against their reservation slots.
12. Users shall not share or borrow other users’ reservation slots.
13. Tool usage and reservation utilization will be monitored. Book what you need and use what you book.
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