The mission of the Microelectronics Research Center (MRC) at The University of Texas at Austin (UT-Austin) is to perform education, research and development in materials and electronic devices. MRC offers opportunities to perform research in novel materials of interest to the IC industry, optoelectronics and nanophotonics, novel electronic devices and nanostructures, and interconnects and packaging for both academic and industrial users. MRC provides the training and experience for graduating students to successfully pursue a rewarding career in microelectronics. MRC contributes strongly to advancements in microelectronic devices, integrated circuits, and optoelectronic components. This endeavor includes state-of-the-art Si-based and III-V compound epitaxial crystal-growth techniques fundamental research on optoelectronic devices, investigation of advanced electrical and optical interconnect technologies, and the simulation and development of novel structures, processes and materials for future generations of integrated circuits. To accomplish this, UT-Austin has assembled one of the largest and most diverse university semiconductor research programs in the world. Evolving technological challenges and continuing innovation coupled with extensions of current research are expected to yield a bright future for MRC.In the silicon area, MRC has developed new approaches to scaling classical transistors to deep submicron geometries, resulting in high levels of integration, reliability, and performance in integrated circuits. New dielectric materials for MOS transistors and new processing techniques for low thermal budget manufacturing have been developed and are under further active investigation. The Microelectronic Research Center has created computer programs that simulate ion implantation. These programs have been utilized by major integrated circuit manufacturers throughout the United States. The Optoelectronics Group at MRC has developed novel vertical-cavity, surface-emitting lasers, and radically new photodetectors. Detailed studies of the device physics that govern the performance of these lasers and photodiodes have led to significant improvements in performance and functionality. The Microelectronics Research Center has also established active research efforts in GaN and related materials, which is projected to become the dominant material for short-wavelength emitters, ultraviolet photodetectors and high-power electronics. The Microelectronics Research Center is also recognized as a leader in the area of interconnects, both optical and electrical. The Microelectronics Research Center Facility (MRC) at The University of Texas at Austin (UT) is a research laboratory funded by the National Science Foundation (NSF) through the National NanoTechnology Coordinated Infrastructure (NNCI).