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Acid Hood - WPS - H16 & H18

Equipment Type: 
Silicon Etch
Equipment Area: 
North Cleanroom
Equipment Location: 
1.738
Description: 

Acid hood with KoH
Do NOT remove Labware from this tool!

Procedures: 

KOH solution for etching Si. Do not left the solution unattended!
Please decontaminate labware and samples with 5:1:1 H20:H202:HCl according to the procedure posted on the Hood, after KOH wet etch.