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Diffusion Sintering -BRUTE- 4" Tube #6

Equipment Type: 
Diffusion
Equipment Area: 
North Cleanroom
Equipment Location: 
1.756
Description: 

Tube #6 (the bottom one, in the rack closest from the cleanroom windows)

Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube)

Compatible Materials: 
Si Metalized wafers
Incompatible Materials: 
III-V / Hi K / SiGe / Photoresist
Procedures: 
  1. Log on to the tool using the LabAccess terminal.
  2. Log off of the tool using the LabAccess terminal.

Temperature Control not working properly.