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Diffusion Sintering -BRUTE- 4" Tube #6
Tube #6 (the bottom one, in the rack closest from the cleanroom windows)
Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube)
- Log on to the tool using the LabAccess terminal.
- Log off of the tool using the LabAccess terminal.
Temperature Control not working properly.