You are here
E-beam Evaporator & Ion Assisted - CHA#2
E-beam Evaporator & Ion Assisted - CHA#2
III-V Metals
North Cleanroom
1.748
E-beam evaporator W/ Oxigen Ion Assist
Ar, O2
Compatible Materials:
Metal/dielectric with vapor pressure higher than 10-6 Torr at 1000°C:
Hf, Ir, Mo, Ni, Si, Pt, Ta, Ti, W
Incompatible Materials:
All Metals with a vapor pressure lower then 10^6 Torr
1. Log on to the tool using the LabAccess terminal.
2. Read PDF instructions.
3. Log off of the tool using the LabAccess terminal.