You are here

E-beam Evaporator & Ion Assisted - CHA#2

Equipment Type: 
III-V Metals
Equipment Area: 
North Cleanroom
Equipment Location: 
1.748
Description: 

E-beam evaporator W/ Oxigen Ion Assist

Gases: 
Ar, O2
Compatible Materials: 
Metal/dielectric with vapor pressure higher than 10-6 Torr at 1000°C: Hf, Ir, Mo, Ni, Si, Pt, Ta, Ti, W
Incompatible Materials: 
All Metals with a vapor pressure lower then 10^6 Torr
Procedures: 

1. Log on to the tool using the LabAccess terminal.
2. Read PDF instructions.
3. Log off of the tool using the LabAccess terminal.