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E-line Raith - Electron beam lithography

E-line Raith - Electron beam lithography

North Cleanroom

Electron Beam Lithography (EBL)

E-line Raith

Features: This EBL tool consists of a load lock, laser-interferometer controlled stage, six aperture selections,
and a good quality scanning electron microscopy (SEM) capability.
The maximum electron high tension (EHT) is of 30 kV.

Compatible Materials: 
No Restrictions
Incompatible Materials: 
Highly degassing material or life sample

A training video how to do electron beam lithography using e-line Raith: