|
Solvent Hood - WPS - J24 |
North Cleanroom |
1.728 |
III-V Lithography |
|
Etcher RIE Batchtop PlasmaTherm |
North Cleanroom |
1.738 |
Silicon Etch |
|
Rapid Thermal Process -AET- |
North Cleanroom |
1.756A |
Diffusion |
|
Diffusion Sintering -BRUTE- 4" Tube #6 |
North Cleanroom |
1.756 |
Diffusion |
|
SEM ZEISS Neon 40 - Bruker EDS - Raith Elphy pattern generator |
North Cleanroom |
1.730A |
Metrology |
|
Furnace (Sintering ) - MiniBrute |
North Cleanroom |
1.824 |
Silicon Metals |
|
Etcher RIE 790 Plasma Therm #2 |
North Cleanroom |
1.738 |
Silicon Etch |
|
E-beam evaporator CHA#3 |
North Cleanroom |
1.748 |
III-V Metals |
|
XRD Rigaku SmartLab |
North Cleanroom |
1.802 |
Metrology |
|
Spin Rinse Dryer SAT (no PR. no Metal) |
North Cleanroom |
1.756 |
Diffusion |
|
Plasma Cleaner _TEM holder |
North Cleanroom |
TEM TECNAI Room |
Metrology |
|
Sputter DC Aluminum/ Ti - UNIVEX450 |
North Cleanroom |
1.736 |
Silicon Metals |
|
Solvent Hood - H03 (No Au) |
North Cleanroom |
1.738 |
Silicon Etch |
|
LPCVD Nitride PTL |
North Cleanroom |
1.756 |
Diffusion |
|
Rapid Thermal Anneal Silicon -Allwin 610 - |
North Cleanroom |
1.756A |
Diffusion |
|
Diffusion Pre-clean Acid Hood C-16 |
North Cleanroom |
1.756 |
Diffusion |
|
Sputter Coater Emitech K575X -SEM sample preparation |
North Cleanroom |
|
Metrology |
|
Thermal Evaporator (Metal Deposition) - Veeco |
North Cleanroom |
1.736 |
Silicon Metals |
|
Acid Hood - H14 & H15- Resist removal (no Au) |
North Cleanroom |
1.738 |
Silicon Etch |
|
LPCVD PolySilicon PTL |
North Cleanroom |
1.756 |
Diffusion |
|
Chemical-mechanical planarization (CMP) |
North Cleanroom |
Diffusion Back Aisle |
Silicon Etch |
|
Diffusion Pre-clean Acid Hood C-14 |
North Cleanroom |
1.756 |
Diffusion |
|
Asher Nordson March PX-250 |
North Cleanroom |
1.720 |
Silicon Lithography |
|
Sputter DC/RF- KJL(NEW) |
North Cleanroom |
1.736 |
Silicon Metals |
|
Acid Hood - H16 & H18- KoH Etch |
North Cleanroom |
1.738 |
Silicon Etch |
|
LPCVD LTO PTL |
North Cleanroom |
1.756 |
Diffusion |
|
Spin Rinse Dryer Verteq 1 & 2 (No Photoresist, no Metal) |
North Cleanroom |
1.756 |
Diffusion |
|
Diffusion Pre-clean Acid Hood (Gate) C-11 |
North Cleanroom |
1.756 |
Diffusion |
|
HMDS - YES Oven |
North Cleanroom |
1.720 |
Silicon Lithography |
|
Acid Hood - G12 & G14- Metal etch (no Au) |
North Cleanroom |
1.736 |
Silicon Metals |
|
Etcher ICP Deep Silicon PlasmaTherm Versaline |
North Cleanroom |
1.738 |
Silicon Etch |
|
Etcher ICP 2300 Exelan Flex LAM |
North Cleanroom |
1.750 |
Silicon Etch |
|
Anneal (Doped) - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Atomic Force Microscope - DI3000 |
North Cleanroom |
1.728 |
Metrology |
|
Photolithography i-g line mask aligner SussMicrotec -MA6/BA6 |
North Cleanroom |
1.720 |
Silicon Lithography |
|
Solvent Hood - G8 & G11 - Cr/Al etch |
North Cleanroom |
1.736 |
Silicon Metals |
|
Etcher ICP STS |
North Cleanroom |
1.736 |
Silicon Etch |
|
Anneal (Field Oxide) - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Atomic Force Microscope BRUKER Icon - New |
North Cleanroom |
1.728 |
Metrology |
|
Photoresist Spin Coater - L10 (no Au) |
North Cleanroom |
1.720 |
Silicon Lithography |
|
ALD Cambridge NanoTech SavannahTM 200 |
North Cleanroom |
1.704 |
Silicon Metals |
|
PECVD (790 Plasma Therm #1) |
North Cleanroom |
1.750 |
Diffusion |
|
Anneal (Gate Oxide) - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Optical Microscopes Olympus BX51 |
North Cleanroom |
|
Metrology |
|
Photolithography E-beam writer Jeol 6000 FSE |
North Cleanroom |
1.720A |
Silicon Lithography |
|
Photoresist Spin coater- Brewer Science |
North Cleanroom |
1.720 |
Silicon Lithography |
|
ALD Fiji w/ remote plasma & ozone generator |
North Cleanroom |
1.756 |
Silicon Metals |
|
Etcher RIE 790 Plasma Therm #1 |
North Cleanroom |
1.750 |
III-V Etch |
|
UV Ozone cleaner |
North Cleanroom |
1.756A |
Diffusion |
|
Anneal (Undoped) - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Optical Microscope Olympus BH-2 |
North Cleanroom |
|
Metrology |
|
Asher (Microwave) 300 PVA Tepla |
North Cleanroom |
1.720 |
Silicon Lithography |
|
Etcher Trion Oracle |
North Cleanroom |
1.750 |
Silicon Etch |
|
Diffusion Doping POCl3 - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Spectrophotometer Nanospec AFT 180 |
North Cleanroom |
1.7 |
Metrology |
|
Photolithography i-g line mask aligner - EVG |
North Cleanroom |
1.728 |
III-V Lithography |
|
Rapid Thermal Anneal - AG Associates-Allwin610 III-V |
North Cleanroom |
1.748 |
III-V Metals |
|
Solvent Hood - WPS - F03 |
North Cleanroom |
1.750 |
III-V Etch |
|
LPCVD Nitride - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Spectrophotometer Nanospec Reflectometer AFT |
North Cleanroom |
1.7 |
Metrology |
|
Wafer Bonder AML |
North Cleanroom |
1.728 |
Diffusion |
|
E-beam evaporator CHA#1 |
North Cleanroom |
1.748 |
III-V Metals |
|
Acid Hood - WPS - F06 |
North Cleanroom |
1.750 |
III-V Etch |
|
LPCVD Amorphous silicon - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Optical Confocal Microscope LEXT Olympus |
North Cleanroom |
1.7 |
Metrology |
|
Photolithography i-g line mask aligner - MJB4 Suss Microtec |
North Cleanroom |
1.728 |
III-V Lithography |
|
E-beam Evaporator & Ion Assisted - CHA#2 |
North Cleanroom |
1.748 |
III-V Metals |
|
Etcher RIE Oxford 80 |
North Cleanroom |
1.750 |
Silicon Etch |
|
E-line Raith - Electron beam lithography |
North Cleanroom |
1.730A |
Metrology |
|
LPCVD Low Temp Oxide - MRL |
North Cleanroom |
1.756 |
Diffusion |
|
Four-point probe Veeco FPP5000 |
North Cleanroom |
1.7 |
Metrology |
|
Wafer Press |
North Cleanroom |
1.728 |
III-V Lithography |
|
Acid Hood - WPS - E02 |
North Cleanroom |
1.748 |
III-V Metals |
|
Etcher ICP Oxford 100 |
North Cleanroom |
1.750 |
III-V Etch |
|
Diffusion Oxide - BRUTE - Undoped - 4" |
North Cleanroom |
1.756 |
Diffusion |
|
Ellipsometer J.A. Woollam M-2000 DI |
North Cleanroom |
1.730 |
Metrology |
|
Acid Hood - WPS - J19 |
North Cleanroom |
1.728 |
III-V Lithography |
|
Solvent Hood - E05 Lift off applications |
North Cleanroom |
1.748 |
III-V Metals |
|
Diffusion Field Oxide - BRUTE- Undoped Tube #4 |
North Cleanroom |
|
Diffusion |
|
Optical Profilometer -Dektak 150 |
North Cleanroom |
1.748 |
Metrology |
|
Photoresist Spin coater J21 - J23 |
North Cleanroom |
1.728 |
III-V Lithography |
|
Diffusion Gate Oxide - BRUTE - 4" Tube #5 |
North Cleanroom |
1.756 |
Diffusion |
|
TEM TECNAI G2 F30 X-TWIN |
North Cleanroom |
1.824 |
Metrology |
|
Wire bonder (Au ball ) Kulicke & Soffa |
South Cleanroom |
2.406 |
Packaging |
|
Ion miller Oxford ionfab 300 |
South Cleanroom |
|
III-V Etch |
|
TriboIndenter TI 950 : Nanomechanical characterization |
South Cleanroom |
1.205 |
Metrology |
|
Vacuum Oven (Blue vacuum Oven) |
South Cleanroom |
|
Diffusion |
|
Electroplating - Nickel |
South Cleanroom |
|
Silicon Metals |
|
NASCENT nmFab Services |
South Cleanroom |
|
|
|
Maskless Lithography – Bruker Lightning |
South Cleanroom |
|
|
|
Wire Bounder West-bond 7400A |
South Cleanroom |
2.406 |
Packaging |
|
sputtering KJL south cleanroom |
South Cleanroom |
|
III-V Metals |
|
Dicing Saw ACT |
South Cleanroom |
2.406 |
Packaging |
