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LPCVD PolySilicon PTL

LPCVD PolySilicon PTL

Diffusion

North Cleanroom

1.756

Process at 625C

Compatible Materials:

Si/SiGe

Incompatible Materials:

Polymer/metal/iii-v

© 2013 Microelectronics Research Center | Department of Electrical and Computer Engineering | The University of Texas at Austin