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Mask Aligner - EVG

Equipment Type: 
III-V Lithography
Equipment Area: 
North Cleanroom
Equipment Location: 
1.728
Description: 

Properties: Mask holder 5inches, Wafer size 2 to 4 inches and pieces. Illumination Wavelength 265nm.
Exposure Modes: soft contact, hard contact, Vaccum contact , Proximity

Compatible Materials: 
No Restrictions
Procedures: 

Log on the system via Lab Access
Make sure that the power is 500W, the UV light is on
Start the EV620.exe program
Logon
Open recipe 1 (for top alignment) or recipe 2 (for bottom alignment). Check the parameter and run.
Follow the steps by steps procedure given by the software
Exit the program when done. Log off from lab access.
The system should stay on (power, light).