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Solvent Hood - G8 & G11 - Cr/Al etch

Equipment Type: 
Silicon Metals
Equipment Area: 
North Cleanroom
Equipment Location: 
1.736
Description: 

Solvent Hood - Do NOT remove Labware from this tool!

Compatible Materials: 
Silicon Based Materials
Incompatible Materials: 
Au
Procedures: 

1. Log on to the tool using the LabAccess terminal.
Cr and Al etch. Please collect the acid etchant in a waste bottle.
2. Log off of the tool using the LabAccess terminal.