You are here

Facilities » Equipment » North Cleanroom

Spin Rinse Dryer SAT (no PR. no Metal)

Spin Rinse Dryer SAT (no PR. no Metal)

Diffusion
North Cleanroom
1.756
Read more

Semitool Spray Acid Tool, Piranha Clean Required

Compatible Materials: 
Si / SiGe
Incompatible Materials: 
Metals Photoresist
  1. Log on to the tool using the LabAccess terminal.
  2. Log off of the tool using the LabAccess terminal.