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Spin Rinse Dryer Verteq 1 & 2

Equipment Type: 
Diffusion
Equipment Area: 
North Cleanroom
Equipment Location: 
1.756
Description: 

Verteq Spin Rinser Drier, Piranha Clean Required

Compatible Materials: 
Si / SiGe
Incompatible Materials: 
Metals / Photoresist
Procedures: 

1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.