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Vacuum Oven (Blue vacuum Oven)

Equipment Type: 
Diffusion
Equipment Area: 
South Cleanroom
Description: 

CIRCULAR VACUUM OVENS from T-M Vacuum Products, Inc.
Vacuum bake out and curing ovens capable of attaining temperatures up to 600C.
Standard pumping packages available from rough vacuum to ultra-high vacuum capabilities.
Touch screen PLC control systems and data logging capability.

Compatible Materials: 
Si, metals III-V,
Incompatible Materials: 
Organics, Polymers (photoresist)