Type A Users - Academic User
equipment usage:
- $50/hour
- CAP of $3,500/month/ Faculty adviser (professor, including the equipment outside the CAP)
Type B Users - Small Company Employee User
equipment usage:
- $50/hour
- CAP of $2,500/month/project and 75% discount for the fees above the cap
Type C Users - Large Company Employee User ( >300 employees)
equipment usage:
- $50/hour
- CAP of $2500/month/user/project and 75% discount for the fees above the cap
Type D Users- Remote User
$100/hour - No CAP
** Equipment and services that billed outside the monthly CAP **
TRAINING - $60 per hour/ trainee
Rigaku SmartLab Multipurpose θ /θ X-ray Diffraction System - $50 per hour
AFM Nanoscope V Veeco - $50 per hour
FE-SEM Neon 40 - $50 per hour
CMP- $20 per hour
Plasma Therm Deep Si RIE- $50 per hour
FIJI ALD- $50 per hour
LAM 2300 Exelan etcher - $75 per hour
Raith - $50 per hour
For all companies, there is a University surcharge of 26.5% on top of these fees.
To see the rates for the other tools please click the link to the text file below.
File:
