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E-beam evaporator CHA#1

E-beam evaporator CHA#1

III-V Metals
North Cleanroom
1.748
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Features: 4 pockets for 25cc crucible
10-6 Torr base pressure (cryo pumped)
crystal thickness monitor

Compatible Materials: 
Si / SiGe / III-V
Incompatible Materials: 
NA

1. Log on to the tool using the LabAccess terminal.
2. Read PDF instructions.
3. Log off of the tool using the LabAccess terminal.