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E-beam evaporator CHA#1

Equipment Type: 
III-V Metals
Equipment Area: 
North Cleanroom
Equipment Location: 
1.748
Description: 

Features: 4 pockets for 25cc crucible
10-6 Torr base pressure (cryo pumped)
crystal thickness monitor

Compatible Materials: 
Si / SiGe / III-V
Incompatible Materials: 
NA
Procedures: 

1. Log on to the tool using the LabAccess terminal.
2. Read PDF instructions.
3. Log off of the tool using the LabAccess terminal.