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E-beam evaporator CHA#3

Equipment Type: 
III-V Metals
Equipment Area: 
North Cleanroom
Equipment Location: 
1.748
Description: 

4 pockets of 15cc (manual selection of the pocket)
Inficon Controller
5kW power supply
Cryo pumped (1h30min to reach 10-8 Torr)
Thickness monitoring in situ with Au crystal
Up to 3 4inch wafers clips on the flat rotating holder plate.

Gases: 
None
Compatible Materials: 
For thick deposition and Au, Pt depostion
Incompatible Materials: 
None