You are here

Acid Hood - H16 & H18- KoH Etch

Equipment Type: 
Silicon Etch
Equipment Area: 
North Cleanroom
Equipment Location: 
1.738
Description: 

Acid hood with KoH Do NOT remove Labware from this tool!

Potassium ions are high contaminants for CMOS devices

Procedures: 

KOH solution for etching Si. Do not leave the solution unattended!
Please decontaminate labware and samples with 5:1:1 H20:H202:HCl according to the procedure posted on the Hood, after KOH wet etch.