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Diffusion Gate Oxide - BRUTE - 4" Tube #5
Tube #5 (the middle one, in the rack closest from the cleanroom windows)
Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube)
1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.
Used by Tutuc's group once.