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Diffusion Oxide - BRUTE - Undoped - 4"
Tube # 3 (bottom tube, second rack: the further away off the cleanroom window)
Brute Atmospheric Furnace, Piranha Clean Required (unless wafer is coming out of diffusion tube)
1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.
Used for Pyrex (that ontains ions) annealing