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Solvent Hood - H03 (No Au)

Equipment Type: 
Silicon Etch
Equipment Area: 
North Cleanroom
Equipment Location: 
1.738
Description: 

Solvent hood
Do NOT remove Labware from this tool!

Compatible Materials: 
Si / SiGe
Incompatible Materials: 
III / V Au
Procedures: 

1. Log on to the tool using the LabAccess terminal.
2. Log off of the tool using the LabAccess terminal.