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Spectrophotometer Nanospec AFT 180

Equipment Type: 
Metrology
Equipment Area: 
North Cleanroom
Equipment Location: 
1.7
Description: 

Micro-spectrophotometer head can measure in wavelength range 480-790 nm.

Measurement performed in the black dot of the objective aperture image.

Measures within 400A to 40,000A film thickness.

Accuracy in +/-3nm with the Ellipsometer

Procedures: 

Transparent film thickness measurement