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Overview

The MRC laboratories reach users from many different fields: electronics, optics, physics, chemistry, astronomy, as well as chemical, mechanical, and petroleum engineering. Lab users are both from universities and corporates. UT MRC is more than a cleanroom with open-access with a comprehensive set of nano-fabrication equipment – it is a community of scientists who works together to build advanced technology products and knowledge.

The MRC shared NSF NNCI facilities include 12,000 sq. ft. of class 100 and class 1000 clean-room space for Si, III-V and soft materials processing. The cornerstone of nanodevice fabrication at MRC revolves around Electron-Beam Lithography (EBL). UT MRC operates a direct write JEOL JBX-6000FS/E E-beam (JEOL EBL) and a Zeiss Scanning Electron Microscope (SEM) with Raith EBL capabilities (Zeiss SEM/EBL). JEOL-6000FS/E high resoluition EBL is capable of sub-20nm feature size on masks.

The other micro/nano-fabrication facilities include sputter, e-beam and plasma deposition for metals, silicides and dielectrics, reactive-ion etching, rapid thermal processing and oxidation/diffusion furnaces for Si, Si-Ge and High-K dielectrics, LPCVD for poly-silicon, oxides, nitrides and wet chemistry stations. The characterization laboratories contain the apparatus for comprehensive optical and electrical measurements.

For any communications (poster, publications, conferences) resulting of work accomplished in the shared NNCI Texas Nanofabrication Facilities, please use the following Acknowledgment Quote:
"This work is based on work accomplished at Texas Nanofabrication Facilities supported in part by the National Science Foundation under The National Nanotechnology Coordinated Infrastructure (grant EECS-1542159)."