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Process Equipment

Name Area Locationsort ascending Type
Plasma Cleaner _TEM holder North Cleanroom TEM TECNAI Room Metrology
Chemical-mechanical planarization (CMP) North Cleanroom Diffusion Back Aisle Silicon Etch
Wire Bounder West-bond 7400A South Cleanroom 2.406 Packaging
Dicing Saw ACT South Cleanroom 2.406 Packaging
Wire bonder (Au ball ) Kulicke & Soffa South Cleanroom 2.406 Packaging
Furnace (Sintering ) - MiniBrute North Cleanroom 1.824 Silicon Metals
TEM TECNAI G2 F30 X-TWIN North Cleanroom 1.824 Metrology
XRD Rigaku SmartLab North Cleanroom 1.802 Metrology
Rapid Thermal Anneal Silicon -Allwin 610 - North Cleanroom 1.756A Diffusion
UV Ozone cleaner North Cleanroom 1.756A Diffusion
Rapid Thermal Process -AET- North Cleanroom 1.756A Diffusion
Spin Rinse Dryer Verteq 1 & 2 (No Photoresist, no Metal) North Cleanroom 1.756 Diffusion
Anneal (Doped) - MRL North Cleanroom 1.756 Diffusion
Anneal (Field Oxide) - MRL North Cleanroom 1.756 Diffusion
Anneal (Gate Oxide) - MRL North Cleanroom 1.756 Diffusion
Anneal (Undoped) - MRL North Cleanroom 1.756 Diffusion
Diffusion Doping POCl3 - MRL North Cleanroom 1.756 Diffusion
LPCVD Nitride - MRL North Cleanroom 1.756 Diffusion
LPCVD Amorphous silicon - MRL North Cleanroom 1.756 Diffusion
LPCVD Low Temp Oxide - MRL North Cleanroom 1.756 Diffusion
Diffusion Oxide - BRUTE - Undoped - 4" North Cleanroom 1.756 Diffusion
Diffusion Gate Oxide - BRUTE - 4" Tube #5 North Cleanroom 1.756 Diffusion
Diffusion Sintering -BRUTE- 4" Tube #6 North Cleanroom 1.756 Diffusion
Spin Rinse Dryer SAT (no PR. no Metal) North Cleanroom 1.756 Diffusion
Diffusion Pre-clean Acid Hood C-16 North Cleanroom 1.756 Diffusion
LPCVD Nitride PTL North Cleanroom 1.756 Diffusion
Diffusion Pre-clean Acid Hood C-14 North Cleanroom 1.756 Diffusion
LPCVD PolySilicon PTL North Cleanroom 1.756 Diffusion
Diffusion Pre-clean Acid Hood (Gate) C-11 North Cleanroom 1.756 Diffusion
LPCVD LTO PTL North Cleanroom 1.756 Diffusion
ALD Fiji w/ remote plasma & ozone generator North Cleanroom 1.756 Silicon Metals
PECVD (790 Plasma Therm #1) North Cleanroom 1.750 Diffusion
Etcher RIE 790 Plasma Therm #1 North Cleanroom 1.750 III-V Etch
Etcher Trion Oracle North Cleanroom 1.750 Silicon Etch
Solvent Hood - WPS - F03 North Cleanroom 1.750 III-V Etch
Acid Hood - WPS - F06 North Cleanroom 1.750 III-V Etch
Etcher RIE Oxford 80 North Cleanroom 1.750 Silicon Etch
Etcher ICP Oxford 100 North Cleanroom 1.750 III-V Etch
Etcher ICP 2300 Exelan Flex LAM North Cleanroom 1.750 Silicon Etch
E-beam evaporator CHA#3 North Cleanroom 1.748 III-V Metals
Rapid Thermal Anneal - AG Associates-Allwin610 III-V North Cleanroom 1.748 III-V Metals
E-beam evaporator CHA#1 North Cleanroom 1.748 III-V Metals
E-beam Evaporator & Ion Assisted - CHA#2 North Cleanroom 1.748 III-V Metals
Acid Hood - WPS - E02 North Cleanroom 1.748 III-V Metals
Optical Profilometer -Dektak 150 North Cleanroom 1.748 Metrology
Solvent Hood - E05 Lift off applications North Cleanroom 1.748 III-V Metals
Etcher RIE 790 Plasma Therm #2 North Cleanroom 1.738 Silicon Etch
Solvent Hood - H03 (No Au) North Cleanroom 1.738 Silicon Etch
Acid Hood - H14 & H15- Resist removal (no Au) North Cleanroom 1.738 Silicon Etch
Acid Hood - H16 & H18- KoH Etch North Cleanroom 1.738 Silicon Etch
Etcher ICP Deep Silicon PlasmaTherm Versaline North Cleanroom 1.738 Silicon Etch
Etcher RIE Batchtop PlasmaTherm North Cleanroom 1.738 Silicon Etch
Etcher ICP STS North Cleanroom 1.736 Silicon Etch
Sputter DC Aluminum/ Ti - UNIVEX450 North Cleanroom 1.736 Silicon Metals
Thermal Evaporator (Metal Deposition) - Veeco North Cleanroom 1.736 Silicon Metals
Sputter DC/RF- KJL(NEW) North Cleanroom 1.736 Silicon Metals
Acid Hood - G12 & G14- Metal etch (no Au) North Cleanroom 1.736 Silicon Metals
Solvent Hood - G8 & G11 - Cr/Al etch North Cleanroom 1.736 Silicon Metals
SEM ZEISS Neon 40 - Bruker EDS - Raith Elphy pattern generator North Cleanroom 1.730A Metrology
Ellipsometer J.A. Woollam M-2000 DI North Cleanroom 1.730 Metrology
Photolithography i-g line mask aligner - EVG North Cleanroom 1.728 III-V Lithography
Wafer Bonder AML North Cleanroom 1.728 Diffusion
Photolithography i-g line mask aligner - MJB4 Suss Microtec North Cleanroom 1.728 III-V Lithography
Wafer Press North Cleanroom 1.728 III-V Lithography
Acid Hood - WPS - J19 North Cleanroom 1.728 III-V Lithography
Photoresist Spin coater J21 - J23 North Cleanroom 1.728 III-V Lithography
Solvent Hood - WPS - J24 North Cleanroom 1.728 III-V Lithography
Atomic Force Microscope - DI3000 North Cleanroom 1.728 Metrology
Atomic Force Microscope Nanoscope V Veeco North Cleanroom 1.728 Metrology
Photolithography E-beam writer Jeol 6000 FSE North Cleanroom 1.720A Silicon Lithography
Asher Nordson March PX-250 North Cleanroom 1.720 Silicon Lithography
HMDS - YES Oven North Cleanroom 1.720 Silicon Lithography
Photolithography i-g line mask aligner SussMicrotec -MA6/BA6 North Cleanroom 1.720 Silicon Lithography
Photoresist Spin Coater - L10 (no Au) North Cleanroom 1.720 Silicon Lithography
Photoresist Spin coater- Brewer Science North Cleanroom 1.720 Silicon Lithography
Asher (Microwave) 300 PVA Tepla North Cleanroom 1.720 Silicon Lithography
ALD Cambridge NanoTech SavannahTM 200 North Cleanroom 1.704 Silicon Metals
Spectrophotometer Nanospec AFT 180 North Cleanroom 1.7 Metrology
Spectrophotometer Nanospec Reflectometer AFT North Cleanroom 1.7 Metrology
Optical Confocal Microscope LEXT Olympus North Cleanroom 1.7 Metrology
Four-point probe Veeco FPP5000 North Cleanroom 1.7 Metrology
TriboIndenter TI 950 : Nanomechanical characterization South Cleanroom 1.205 Metrology
Sputter Coater Emitech K575X -SEM sample preparation North Cleanroom Metrology
Step and Flash Imprint Lithography IMPRIO 100 South Cleanroom Silicon Lithography
Diffusion Field Oxide - BRUTE- Undoped Tube #4 North Cleanroom Diffusion
Ion miller Oxford ionfab 300 South Cleanroom III-V Etch
Optical Microscopes Olympus BX51 North Cleanroom Metrology
Optical Microscope Olympus BH-2 North Cleanroom Metrology
Electroplating - Nickel South Cleanroom Silicon Metals
Vacuum Oven (Blue vacuum Oven) South Cleanroom Diffusion
sputtering KJL south cleanroom South Cleanroom III-V Metals